The new megasonic cleaning system XC1500-ME with optimized homogenity features for high cleaning efficiency, homogenity and repeatability by using the „permanent frequency autotuning system“ is especially designed for the cleaning of substrates with sub-micron structures.
Additionally the new model XC1500-ME has new features for future requirements (Ethernet-interface for Industry 4.0, USB-interface, TFT-display with touchscreen menu, …)