Megasonic Cleaning System

New Megasonic Cleaning System:
Model XC1500-ME

Ready for Industry 4.0 applications due to the Ethernet/LAN interface.

  • New high performance micro processor control
  • USB- and Ethernet- interface (additional to the RS485)
  • 5“-TFT-display with touchscreen (parameters can be read and modified directly via touchscreen menu)
  • New power output unit with optimized efficiency factor
Metronics Generator XC1500-ME
Metronics_Generator_XC1500-ME

The new megasonic cleaning system XC1500-ME with optimized homogenity features for high cleaning efficiency, homogenity and repeatability by using the „permanent frequency autotuning system“ is especially designed for the cleaning of substrates with sub-micron structures.

Additionally the new model XC1500-ME has new features for future requirements (Ethernet-interface for Industrie 4.0, USB-interface, TFT-display with touchscreen menu, …)

Quartz Tank
Stainless Steel Tank
PVDF/PFA Tank

Applications:

Etching (H2SO4, H2O2, SC-1, SC-2, …) up to 90°C
cleaning of wafers (FR, QDR), masks, LCD-panels, solar cells and other substrates

Features:

  • Removes particles in the sub-micron area
  • Gentle cleansing
  • Automatized frequency adjustment for an optimal cleaning result
  • Frequency: 1 MHz
  • Power Density: up to 5 W/cm²